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        您好,歡迎光臨成都南光機器有限公司 English / 簡體中文
        產品展示
        ?GFC系列高性能全自動真空鍍膜機
        • 用途及特點
        • 規格參數
          用途及特點
          Use and Features
           
          ●適應于玻璃、塑膠等基片上鍍制各類光學薄膜和其它機能性裝飾薄膜的批量化生產
          ●采用******的電氣控制系統,良好的用戶操作界面,大大減輕作業人員的負擔
          ●RCS自動鍍膜控制系統******整個鍍膜過程自動完成
          ●基片架轉動采用磁流體密封技術******真空密封,中心驅動方式******薄膜產品的均勻性及重復性
          ●優化的配置、嚴格的品質控制******產品質量的穩定性和重復性
          ●排氣速率.鍍膜效率的提高,大大縮短了產品生產周期
          GFC系列高性能全自動真空鍍膜機
          Series GFC High Quality Vacuum Thin Film Coater
          技術參數
          Technical parameters
          真空室體
          Vacuum chamber
          Ø1300*1450mm,SUS304材質
          φ1,300*1,450mm,SUS304 material
           
          排氣系統
          Air exhaust system
          KT-500擴散泵2臺,總排氣速率(加載水冷阱)11,000Pa.L/S
          Two sets of KT-500 diffusion pump, with a gross exhaust velocity (loaded with water-cooling trap) of 11,000Pa.L/S;
          極限真空≤2.0E-4Pa;排氣時間≤15min(大氣→4.0E-3Pa)
          Ultimate vacuum ≤2.0E-4Pa; exhaust time ≤15min (atmosphere→4.0E-3Pa)
          基片架
          Substrate holder
          Ø1200四葉扇形基片架, 3~30rpm轉速;可選配行星基片架、翻轉機構等
          φ1200 four-blade sector-shaped substrate holder, rotating speed 3~30rpm; a planet substrate holder or a turnover mechanism can also be matched;
          加熱機構
          Heating means
          ******350℃,PID控制;恒溫20min后溫度均勻性250±10℃
          Maximum 350℃, PID control; temperature homogeneity being 250±10℃ after 20 min of constant temperature control;
          石英監控儀
          Quartz monitor
          進口石英晶體膜厚監控儀;2點(或6點)晶振探頭
          Imported quartz crystal monitor on film depth, with two-point (or six-point) crystal probe;
          電子束蒸發源
          Electron beam evaporation source
          10KW電子槍 2臺,12點坩堝和環形坩堝
          Two sets of 10KW electron gun, 12-point crucible or ring-shaped crucible;
          電阻蒸發源
          Resistance evaporation source
          功率4KW(一對、兩對或多對)
          Power of 4KW (one pair, two pairs or more pairs)
          膜厚修正板
          Film depth correction board
          2個自動可倒式膜厚修正機構
          Two automatic film depth correction mechanisms of collapsible type
          反應氣體
          Reaction gas
          APC自動壓強控制儀,質量流量計
          APC automatic pressure controller, mass flowmeter
          離子源
          Ion source
          可選配Kafman、Holl或RF離子源
          Available for matching of Kafman, Holl or RF ion source
          低溫抽氣裝置
          Low temperature evacuating equipment
          進口低溫抽氣裝置有效捕集水蒸汽,******溫度-130℃
          The imported low-temperature evacuating equipment can effectively gather water vapor; minimum temperature -130℃
          RCS系統
          RCS system
          基于WINDOWS的全自動鍍膜軟件
          Windows-based full automatic coating software
          控制系統
          Control system
          控制柜(液晶觸摸式彩色顯示器),遠程控制遙控盒
          Control cabinet (with liquid crystal color touch screen), remote-control box for remote control
           
          消耗能源
          Energy consumption
          3相,220/380VAC,50Hz;~70KVA
          Three-phase, 220/380VAC,50Hz;~70KVA
          水流量140L/min,壓力0.3~0.5MPa
          Water flow 140L/min, pressure 0.3~0.5MPa
          壓縮空氣0.5MPa~0.7MPa
          Compressed air 0.5MPa~0.7MPa
          重    量
          Weight
          凈重約4500Kg
          Net weight about 4,500 Kg
          安裝空間
          Installation space
          W4000mmxD6000mmxH2700mm
          W4,000mm×D6,000mm×H2,700mm
           

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